Radio frequency plasma

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Radio frequency plasma

,由 FF Chen 著作 · 2007 · 被引用 9 次 — Since rf voltage is applied, the sheath drop and sheath thickness will oscillate at the rf frequency. Even if one electrode is grounded, the plasma potential ... ,During induction plasma operation, the generator supplies an alternating current (ac) of radio frequency (r.f.) to the torch coil; this ac induces an ... ,由 P Puligundla 著作 · 2020 · 被引用 3 次 — Radio frequency (RF) plasma and microwave plasma can be used for inactivation of bacteria and viruses. Apart from killing of microorganisms, plasma treatment ... ,由 D Shaw 著作 · 2019 · 被引用 1 次 — There have been suggestions that frequencies as high as 60 MHz may be used for this cleaning method, but most published experiments have been ... ,由 E Kralkina 著作 · 2019 — The results of the study of the plasma reactor on the combined magnetron discharge and radio-frequency (RF) inductive discharge located in the external ... ,由 K Yambe 著作 · 2008 · 被引用 8 次 — A denser plasma with a lower electron temperature is produced by radio frequency discharge with the use of multi hollow-cathode (HC). The effect of HC ... ,由 M Moisan 著作 · 1991 · 被引用 201 次 — For example, the electron density obtained for a given hf power density deposited into the plasma is usually higher at microwave than at radio frequencies ... ,由 DP Lymberopoulos 著作 · 1995 · 被引用 158 次 — Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell.

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Radio frequency plasma 相關參考資料
10.3.1.4 Radiofrequency plasmas - iupac

https://media.iupac.org

6 Radiofrequency Plasma Sources for Semiconductor ...

由 FF Chen 著作 · 2007 · 被引用 9 次 — Since rf voltage is applied, the sheath drop and sheath thickness will oscillate at the rf frequency. Even if one electrode is grounded, the plasma potential ...

http://www.seas.ucla.edu

Induction plasma - Wikipedia

During induction plasma operation, the generator supplies an alternating current (ac) of radio frequency (r.f.) to the torch coil; this ac induces an ...

https://en.wikipedia.org

Microwave- and radio-frequency-powered cold plasma ...

由 P Puligundla 著作 · 2020 · 被引用 3 次 — Radio frequency (RF) plasma and microwave plasma can be used for inactivation of bacteria and viruses. Apart from killing of microorganisms, plasma treatment...

https://www.sciencedirect.com

Modelling radio-frequency plasma cleaning of fusion optics

由 D Shaw 著作 · 2019 · 被引用 1 次 — There have been suggestions that frequencies as high as 60 MHz may be used for this cleaning method, but most published experiments have been ...

https://iopscience.iop.org

Physical Processes and Plasma Parameters in a Radio ...

由 E Kralkina 著作 · 2019 — The results of the study of the plasma reactor on the combined magnetron discharge and radio-frequency (RF) inductive discharge located in the external ...

https://www.intechopen.com

Property of plasma by radio frequency discharge with the use ...

由 K Yambe 著作 · 2008 · 被引用 8 次 — A denser plasma with a lower electron temperature is produced by radio frequency discharge with the use of multi hollow-cathode (HC). The effect of HC ...

https://iopscience.iop.org

Radio frequency or microwave plasma reactors? Factors ...

由 M Moisan 著作 · 1991 · 被引用 201 次 — For example, the electron density obtained for a given hf power density deposited into the plasma is usually higher at microwave than at radio frequencies ...

https://avs.scitation.org

Two-Dimensional Self-Consistent Radio Frequency Plasma ...

由 DP Lymberopoulos 著作 · 1995 · 被引用 158 次 — Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell.

https://www.ncbi.nlm.nih.gov