kooi effect
2018年10月14日 — Kooi Effect，俗称白带效应(White Ribben Effect)，Kooi这个人发现我们的LOCOS长完之后用H3PO4 remove SiN之后会在鸟嘴的边缘沿着鸟嘴有一条白边，后来 ... ,这是做LOCOS（硅的局部氧化工艺）的一个问题， 又称白带效应。 用氮化硅作阻挡层生长氧化层，在这种情况下，氮化硅边缘下面的硅表面会形成一层热生长的氮氧化物，氮化硅与 ...,由 TT Sheng 著作 · 1993 · 被引用 3 次 — This SiaN4 film serves as a micro-oxidation masking layer in a later gate oxidation process. This is widely known throughout the industry as the Kooi effect. ,在區域氧化隔離製程中，鳥嘴會造成主動區面積的損失。減少墊氧化層的厚度與增加氮化矽厚度時可降低鳥嘴長度，但將造成嚴重的stress induced-defects，另外Kooi Effect所造成 ... ,Beside this effect, the white ribbon or kooi effect can occur during wet oxidation processes. Thereby nitride of the masking and hydrogen used for the wet ... ,由 TT Sheng 著作 · 1993 · 被引用 3 次 — The defects responsible for the white ribbon in the Kooi effect are observed in the first few seconds of high resolution TEM before they are vaporized. ,由 LWY Ying 著作 · 2012 · 被引用 2 次 — A simplified diagram of the Kooi effect (which is also known as white ribbon effect) is shown in Fig. 6.,2.2.1.4 The Kooi or “white ribbon” effect. The existence of the bird's beak is not the only drawback of the LOCOS process. After the field oxidation and ... ,Historically this dummy oxide was introduced to prevent the Kooi effect in LOCOS isolation scheme, and it is supposed to reduce also the process related stress ...
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 kooi effect 相關參考資料
什么是Kooi Effect？ - 半导体问答网-问题
2018年10月14日 — Kooi Effect，俗称白带效应(White Ribben Effect)，Kooi这个人发现我们的LOCOS长完之后用H3PO4 remove SiN之后会在鸟嘴的边缘沿着鸟嘴有一条白边，后来 ... http://ask.iccourt.com 什么是KOOi效应
这是做LOCOS（硅的局部氧化工艺）的一个问题， 又称白带效应。 用氮化硅作阻挡层生长氧化层，在这种情况下，氮化硅边缘下面的硅表面会形成一层热生长的氮氧化物，氮化硅与 ... https://zhidao.baidu.com A Direct Observation of the Kooi Effect Masking ...
由 TT Sheng 著作 · 1993 · 被引用 3 次 — This SiaN4 film serves as a micro-oxidation masking layer in a later gate oxidation process. This is widely known throughout the industry as the Kooi effect. https://iopscience.iop.org 區域氧化隔離製程及淺溝渠隔離製程對閘極氧化層特性之 ...
在區域氧化隔離製程中，鳥嘴會造成主動區面積的損失。減少墊氧化層的厚度與增加氮化矽厚度時可降低鳥嘴長度，但將造成嚴重的stress induced-defects，另外Kooi Effect所造成 ... https://ndltd.ncl.edu.tw Oxidation: LOCOS technology - Bird's beak
Beside this effect, the white ribbon or kooi effect can occur during wet oxidation processes. Thereby nitride of the masking and hydrogen used for the wet ... https://www.halbleiter.org A Direct Observation of the Kooi Effect Masking Film by ...
由 TT Sheng 著作 · 1993 · 被引用 3 次 — The defects responsible for the white ribbon in the Kooi effect are observed in the first few seconds of high resolution TEM before they are vaporized. https://iopscience.iop.org Failure mechanism and improvement on gate oxide ...
由 LWY Ying 著作 · 2012 · 被引用 2 次 — A simplified diagram of the Kooi effect (which is also known as white ribbon effect) is shown in Fig. 6. https://ieeexplore.ieee.org Local Oxidation Of Siliconfor Isolation
2.2.1.4 The Kooi or “white ribbon” effect. The existence of the bird's beak is not the only drawback of the LOCOS process. After the field oxidation and ... https://web.stanford.edu An Analysis of the Effect of the Steps for Isolation
Historically this dummy oxide was introduced to prevent the Kooi effect in LOCOS isolation scheme, and it is supposed to reduce also the process related stress ... https://www.electrochem.org |