high density plasma
游離率主要決定於電漿中的電子能量. • 大多數電漿反應室游離率均低於0.01%. • 高密度電漿(High density plasma ,HDP)的游. 離率約1∼5%. • 太陽中心處的游離 ... ,HDPCVD. High Density Plasma Chemical Vapor Deposition (HDPCVD) is a special form of PECVD that employs an Inductively Coupled Plasma (ICP) source to ... , AbstractHelicon high-density (up to ~1013 cm−3) plasma sources using a radio frequency wave in the presence of a magnetic field under a low ...,This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma ... ,以high-density plasma 進行詞彙精確檢索結果. 出處/學術領域, 英文詞彙, 中文詞彙. 學術名詞 核能名詞, high-density plasma, 高密度電漿. 學術名詞 電機工程 ,High-Density Plasma Chemical Vapor Deposition (HDP-CVD). 這些介電層沉積產品可為高深寬比間隔提供完整的間隙填充，並具備業界領先的生產量與可靠度。 ,Several types of high-density plasma sources are employed for I-PVD processes and are described in this chapter. Most approaches to I-PVD use some form of ... , High‐density plasma represented by inductively‐coupled plasma (ICP) has increasingly attracted more interests due to its wide application ...,Plasma is one of the four fundamental states of matter, and was first described by chemist Irving .... High temperatures are usually needed to sustain ionisation, which is a defining feature of a plasma. ... The term "plasma density" by itself u
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 high density plasma 相關參考資料
Chapter 7 電漿的基礎原理
游離率主要決定於電漿中的電子能量. • 大多數電漿反應室游離率均低於0.01%. • 高密度電漿(High density plasma ,HDP)的游. 離率約1∼5%. • 太陽中心處的游離 ... http://www.isu.edu.tw HDPCVD - Plasma-Therm
HDPCVD. High Density Plasma Chemical Vapor Deposition (HDPCVD) is a special form of PECVD that employs an Inductively Coupled Plasma (ICP) source to ... http://www.plasma-therm.com Helicon high-density plasma sources: physics and applications
AbstractHelicon high-density (up to ~1013 cm−3) plasma sources using a radio frequency wave in the presence of a magnetic field under a low ... https://www.tandfonline.com High Density Plasma Sources | ScienceDirect
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma ... https://www.sciencedirect.com high-density plasma - 高密度電漿 - 國家教育研究院雙語詞彙
以high-density plasma 進行詞彙精確檢索結果. 出處/學術領域, 英文詞彙, 中文詞彙. 學術名詞 核能名詞, high-density plasma, 高密度電漿. 學術名詞 電機工程 http://terms.naer.edu.tw High-Density Plasma Chemical Vapor Deposition (HDP-CVD)
High-Density Plasma Chemical Vapor Deposition (HDP-CVD). 這些介電層沉積產品可為高深寬比間隔提供完整的間隙填充，並具備業界領先的生產量與可靠度。 https://www.lamresearch.com High-density plasma sources - ScienceDirect
Several types of high-density plasma sources are employed for I-PVD processes and are described in this chapter. Most approaches to I-PVD use some form of ... https://www.sciencedirect.com High‐Density Plasma‐Enhanced Chemical Vapor Deposition ...
High‐density plasma represented by inductively‐coupled plasma (ICP) has increasingly attracted more interests due to its wide application ... https://www.intechopen.com Plasma (physics) - Wikipedia
Plasma is one of the four fundamental states of matter, and was first described by chemist Irving .... High temperatures are usually needed to sustain ionisation, which is a defining feature of a plas... https://en.wikipedia.org |