tcp etch

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tcp etch

Ion beam etching (called RIBE for "reactive ion beam etching"). ... Inductively coupled plasma etching, TCP, * Etching relatively independent of loading , Lam Releases TCP® 9400DFM (Designed For Manufacture) Poly Etch System FREMONT, Calif., July 6, 2000-Lam Research Corporation ...,Lam 9400 TCP Poly Etcher with Envision software; Clean category; for poly and Si etches; maximum etch depth 3um. Lampoly Operating Procedure - Read ... ,DRIE Reactive Ion Etch Reliant Systems ... Kiyo® family (through Kiyo45™); Flex® family (through Flex45™); Exelan® family; DSiE™ family; TCP® 9400 family ... ,Factory: Lam RESEARCH CO., LTD.(台灣科林研發). ▫ Machine Type: TCP 9400SE. ▫ Machine Serial No.: 4114. ▫ Process: 0.35 μm Feature Polysilicon Etching. ,Recipe 內容說明. 本機台蝕刻Poly-Si 採multi-step(Break Through, Main Etch, Over Etch). BT: 10 秒可蝕刻350-400 Å . ME: 33-38 Å /s, Selectivity of Poly to oxide ... ,The TCP® 9400 system uses Lam's patented TCP® technology and offers several key benefits for polysilicon etch. The TCP® technology creates an inductively ... ,TCP® 9600 Metal Etch. System Reliability. ♢ Uptime ≥ 85%. ♢ MTTC 12 hours. ♢ MTBF ≥ 125 hours. ♢ MTBR ≤ 4 hours. Typical Results. ♢ Al Etch rate ... ,什麼是蝕刻(Etching)? 蝕刻是指以 ... 顯著提昇。 TCP9400蝕刻系統使用TCP(Transformer Coupled ... 圖2 多晶矽乾蝕刻機構造之TCP 電漿技術[2]。 圖4 多晶矽乾 ...

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tcp etch 相關參考資料
Dry Etching - Some Special Issues

Ion beam etching (called RIBE for "reactive ion beam etching"). ... Inductively coupled plasma etching, TCP, * Etching relatively independent of loading

https://www.tf.uni-kiel.de

Lam Releases TCP® 9400DFM (Designed For Manufacture ...

Lam Releases TCP® 9400DFM (Designed For Manufacture) Poly Etch System FREMONT, Calif., July 6, 2000-Lam Research Corporation ...

https://investor.lamresearch.c

Lam Research 9400 TCP Poly Etcher, lampoly (clean ...

Lam 9400 TCP Poly Etcher with Envision software; Clean category; for poly and Si etches; maximum etch depth 3um. Lampoly Operating Procedure - Read ...

https://snf.stanford.edu

RELIANT蝕刻產品- Lam Research

DRIE Reactive Ion Etch Reliant Systems ... Kiyo® family (through Kiyo45™); Flex® family (through Flex45™); Exelan® family; DSiE™ family; TCP® 9400 family ...

https://www.lamresearch.com

TCP 9400SE 多晶矽乾蝕刻機儀器簡介

Factory: Lam RESEARCH CO., LTD.(台灣科林研發). ▫ Machine Type: TCP 9400SE. ▫ Machine Serial No.: 4114. ▫ Process: 0.35 μm Feature Polysilicon Etching.

http://www.ndl.org.tw

TCP 9400SE 多晶矽乾蝕刻機標準製程

Recipe 內容說明. 本機台蝕刻Poly-Si 採multi-step(Break Through, Main Etch, Over Etch). BT: 10 秒可蝕刻350-400 Å . ME: 33-38 Å /s, Selectivity of Poly to oxide ...

http://www.ndl.org.tw

TCP® 9400 Etch - HubSpot

The TCP® 9400 system uses Lam's patented TCP® technology and offers several key benefits for polysilicon etch. The TCP® technology creates an inductively ...

http://cdn2.hubspot.net

TCP® 9600 Metal Etch - HubSpot

TCP® 9600 Metal Etch. System Reliability. ♢ Uptime ≥ 85%. ♢ MTTC 12 hours. ♢ MTBF ≥ 125 hours. ♢ MTBR ≤ 4 hours. Typical Results. ♢ Al Etch rate ...

http://cdn2.hubspot.net

什麼是蝕刻(Etching)?

什麼是蝕刻(Etching)? 蝕刻是指以 ... 顯著提昇。 TCP9400蝕刻系統使用TCP(Transformer Coupled ... 圖2 多晶矽乾蝕刻機構造之TCP 電漿技術[2]。 圖4 多晶矽乾 ...

http://www.ndl.org.tw