tcct etch

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tcct etch

For various typical etch chemistries and different settings of the TCCT parameter, the RF signals recorded by the PVx2 sensor wafers were ...,Abstract – The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber ... ,Abstract – The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber ... ,The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber was studied ... ,Temperature and RF Current Sensor Wafers for Plasma Etching ... Improving the Etching Performance of High-Aspect-Ratio Contacts by Wafer ..... The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate ... , A transformer coupled capacitive tuning (TCCT) circuit for an ... tuning circuit with fast impedance switching for plasma etch chambers. Jan 11 ...,31, 2012, and entitled “TCCT Match Circuit for Plasma Etch Chambers.” This application claims priority as a Continuation-in-Part of U.S. patent application Ser. ,31, 2012, and entitled “TCCT Match Circuit for Plasma Etch Chambers.” This application claims priority as a Continuation-in-Part of U.S. patent application Ser. ,Lam's market-leading plasma etch products are used to carve and shape the intricate features of a device, often requiring atomic-scale precision. Applications ...

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tcct etch 相關參考資料
New metrology for tuning the etch rate uniformity in plasma etch ...

For various typical etch chemistries and different settings of the TCCT parameter, the RF signals recorded by the PVx2 sensor wafers were ...

https://www.nanowerk.com

Study on Metrology of ERU Tuning in TCP Reactor ... - YMS Magazine

Abstract – The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber ...

https://www.ymsmagazine.com

Study on metrology of ERU tuning in TCP reactor, using ... - IEEE Xplore

Abstract – The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber ...

https://ieeexplore.ieee.org

Study on metrology of ERU tuning in TCP reactor, using PV×2 sensor ...

The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber was studied ...

https://www.researchgate.net

Temperature and RF Current Sensor Wafers for Plasma Etching ...

Temperature and RF Current Sensor Wafers for Plasma Etching ... Improving the Etching Performance of High-Aspect-Ratio Contacts by Wafer ..... The effect of the transformer-coupled capacitive tuning (...

https://www.researchgate.net

US Patent for Transformer coupled capacitive tuning circuit with fast ...

A transformer coupled capacitive tuning (TCCT) circuit for an ... tuning circuit with fast impedance switching for plasma etch chambers. Jan 11 ...

https://patents.justia.com

US20130135058A1 - Tcct match circuit for plasma etch chambers ...

31, 2012, and entitled “TCCT Match Circuit for Plasma Etch Chambers.” This application claims priority as a Continuation-in-Part of U.S. patent application Ser.

https://patents.google.com

US9059678B2 - TCCT match circuit for plasma etch chambers ...

31, 2012, and entitled “TCCT Match Circuit for Plasma Etch Chambers.” This application claims priority as a Continuation-in-Part of U.S. patent application Ser.

https://patents.google.com

電漿蝕刻| Conductor Etch. Dielectric Etch. TSV Etch | Lam Research ...

Lam's market-leading plasma etch products are used to carve and shape the intricate features of a device, often requiring atomic-scale precision. Applications ...

https://taiwan.lamresearch.com