TCCT plasma
TCCT MATCH CIRCUIT FOR PLASMA ETCH CHAMBERS. (57)摘要. 一種匹配電路,包括下列元件:一電力輸入電路,耦合至RF 源;一內線圈輸入電路,耦合在. 電力輸入電路與內線圈的輸入 ... ,CORONUS系列產品. Plasma Bevel Etch and Deposition. Coronus 系統專注於晶圓邊緣，以提高產品良率。半導體製程會導致殘留物和微粗糙沿著晶圓邊緣積聚，它們可能會剝落 ... ,由 IF Energy 著作 · 2020 — A tracer-containing compact toroid (TCCT) injection have been developed as a new tracer injection technique for studying impurity accumulation and behavior in ... ,由 T SEKI 著作 — To investigate whether tracer ions can be injected into the plasma without separation from the TCCT, we experiment by injecting the TCCT injection into a ... ,The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber was studied ... ,In one embodiment, the ratio of currents can range from 0.1 to 1.5. Commonly, this ratio is referred to as the transformer coupled capacitive tuning (TCCT) ... ,2016年12月6日 — A transformer coupled capacitive tuning (TCCT) circuit for an inductively coupled plasma (ICP) chamber includes a matching circuit including ... ,這些問題包括有限的TCCT範圍、有限的變壓器耦合電漿(TCP，transformer coupled plasma)電力、高線圈電壓、以及線圈電弧作用。因此，反應器腔室的製程窗口(process window) ...
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 TCCT plasma 相關參考資料
(12)發明說明書公告本(11)證書號數 - googleapis.com
TCCT MATCH CIRCUIT FOR PLASMA ETCH CHAMBERS. (57)摘要. 一種匹配電路,包括下列元件:一電力輸入電路,耦合至RF 源;一內線圈輸入電路,耦合在. 電力輸入電路與內線圈的輸入 ... https://patentimages.storage.g Etch - 電漿蝕刻產品
CORONUS系列產品. Plasma Bevel Etch and Deposition. Coronus 系統專注於晶圓邊緣，以提高產品良率。半導體製程會導致殘留物和微粗糙沿著晶圓邊緣積聚，它們可能會剝落 ... https://www.lamresearch.com Plasma and Fusion Research - Vol.15, 2402069 (2020) -
由 IF Energy 著作 · 2020 — A tracer-containing compact toroid (TCCT) injection have been developed as a new tracer injection technique for studying impurity accumulation and behavior in ... https://www.jspf.or.jp Plasma and Fusion Research,ISSN 1880-6821
由 T SEKI 著作 — To investigate whether tracer ions can be injected into the plasma without separation from the TCCT, we experiment by injecting the TCCT injection into a ... https://www.jspf.or.jp Study on metrology of ERU tuning in TCP reactor, using ...
The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber was studied ... http://ieeexplore.ieee.org TCCT match circuit for plasma etch chambers
In one embodiment, the ratio of currents can range from 0.1 to 1.5. Commonly, this ratio is referred to as the transformer coupled capacitive tuning (TCCT) ... https://patents.google.com US Patent for Transformer coupled capacitive tuning circuit ...
2016年12月6日 — A transformer coupled capacitive tuning (TCCT) circuit for an inductively coupled plasma (ICP) chamber includes a matching circuit including ... https://patents.justia.com 用於電漿蝕刻腔室之變壓器耦合電容調諧匹配電路
這些問題包括有限的TCCT範圍、有限的變壓器耦合電漿(TCP，transformer coupled plasma)電力、高線圈電壓、以及線圈電弧作用。因此，反應器腔室的製程窗口(process window) ... https://patents.google.com |