TCCT Lam
本发明涉及用于等离子体蚀刻腔室的TCCT匹配电路，具体而言，本发明公开了 ... US6876155B2 * 2002-12-31 2005-04-05 Lam Research Corporation Plasma ... ,本发明涉及用于等离子体蚀刻腔室的TCCT匹配电路，具体而言，本发明公开了匹配 ... 问题包括有限的TCCT范围、有限的变压器耦合等离子体(TCP)功率、高的线圈 ... US6876155B2 * 2002-12-31 2005-04-05 Lam Research Corporation Plasma ... ,In fact, these structures are so tiny that etch processes are pushing the boundaries of the basic laws of physics and chemistry. Lam's Kiyo® product family delivers ... ,Lam Research Metal RF TCCT Coil Part Number: 853-031436-205A X1 Used texas semiconductor spare parts warehouse surplus amat asml tel smc yaskawa ... ,由 AP Milenin 著作 — the transformer coupled capacitive tuning (TCCT) parameter of the 2300® Versys® Kiyo3x chamber (Lam Research) allows changing the spatial plasma density ... ,本發明大致關於半導體製作，尤其有關用於電漿蝕刻腔室之TCCT匹配電路。 ... 現有的變壓器耦合電容調諧(TCCT，transformer coupled capacitive tuning)匹配設計 ... US6876155B2 * 2002-12-31 2005-04-05 Lam Research Corporation Plasma ... ,2011-04-28. Priority to US201161480314P. 2013-01-25. Application filed by Lam Research Corp. 2013-05-30. Publication of US20130135058A1. 2015-06-16. ,Application filed by Lam Research Corp ... Problems include a limited TCCT range, limited transformer coupled plasma (TCP) power, high coil voltages, and coil ... ,蝕刻製程還能創建高的柱狀特徵，例如，用在矽穿孔(TSV)中來連接晶片、以及用在微機電系統(MEMS)中。 Lam Research的電漿蝕刻系統可提供形成精確結構所需 ...
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 TCCT Lam 相關參考資料
CN103780241A - 用于等离子体蚀刻腔室的tcct匹配 ... - Google
本发明涉及用于等离子体蚀刻腔室的TCCT匹配电路，具体而言，本发明公开了 ... US6876155B2 * 2002-12-31 2005-04-05 Lam Research Corporation Plasma ... https://www.google.com CN103780241A - 用于等离子体蚀刻腔室的tcct匹配电路 ...
本发明涉及用于等离子体蚀刻腔室的TCCT匹配电路，具体而言，本发明公开了匹配 ... 问题包括有限的TCCT范围、有限的变压器耦合等离子体(TCP)功率、高的线圈 ... US6876155B2 * 2002-12-31 2005-04-05 Lam Research Corporation Plasma ... https://patents.google.com Kiyo Product Family - Lam Research
In fact, these structures are so tiny that etch processes are pushing the boundaries of the basic laws of physics and chemistry. Lam's Kiyo® product family delivers ... https://www.lamresearch.com LAM RESEARCH METAL RF TCCT COIL PN: 853-031436-205A X1 ...
Lam Research Metal RF TCCT Coil Part Number: 853-031436-205A X1 Used texas semiconductor spare parts warehouse surplus amat asml tel smc yaskawa ... https://myvisionsurplus.com Study on Metrology of ERU Tuning in TCP Reactor Using ...
由 AP Milenin 著作 — the transformer coupled capacitive tuning (TCCT) parameter of the 2300® Versys® Kiyo3x chamber (Lam Research) allows changing the spatial plasma density ... https://www.ymsmagazine.com TWI606482B - 用於電漿蝕刻腔室之變壓器耦合電容調諧匹配 ...
本發明大致關於半導體製作，尤其有關用於電漿蝕刻腔室之TCCT匹配電路。 ... 現有的變壓器耦合電容調諧(TCCT，transformer coupled capacitive tuning)匹配設計 ... US6876155B2 * 2002-12-31 2005-04-05 Lam Research Corporation Plasma ... https://patents.google.com US20130135058A1 - Tcct match circuit for plasma etch ...
2011-04-28. Priority to US201161480314P. 2013-01-25. Application filed by Lam Research Corp. 2013-05-30. Publication of US20130135058A1. 2015-06-16. https://patents.google.com US9059678B2 - TCCT match circuit for plasma etch chambers ...
Application filed by Lam Research Corp ... Problems include a limited TCCT range, limited transformer coupled plasma (TCP) power, high coil voltages, and coil ... https://patents.google.com 電漿蝕刻產品- Etch - Lam Research
蝕刻製程還能創建高的柱狀特徵，例如，用在矽穿孔(TSV)中來連接晶片、以及用在微機電系統(MEMS)中。 Lam Research的電漿蝕刻系統可提供形成精確結構所需 ... https://www.lamresearch.com |