Apsm mask
吸收相移光罩. absorptive phase shift mask=APSM}. 以absorptive phase shift mask=APSM} 進行詞彙精確檢索結果. 出處/學術領域, 英文詞彙, 中文詞彙. 學術名詞 ,由 PY Yan 著作 · 2011 · 被引用 12 次 — The fabrication of EUVL APSM is more difficult than either the fabrication of an EUVL binary mask or a conventional optical APSM mask. In the ... ,Another type of mask, the alternating phase shift mask (APSM), controls the phase of the incident light by changing the thickness of the transparent regions of ... ,衰減式相移光罩(attenuated phase-shifting mask，APSM)能增進解析度(resolution)及景深(depth of focus)，亦可克服傳統相移式光罩的相位衝突的問題。 ,The use of Alternating Phase Shifting Masks (APSM) for sub 50nm half pitch pattern using 193nm lithography was evaluated. Results show that polarized ... ,Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography. ,由 CA Mack 著作 · 2006 · 被引用 148 次 — Alternating phase-shift masks (AltPSM) are used to print narrow lines in positive photoresist by making the clear areas on either side of the line of opposite ... ,Attenuated Phase Shift Masks (AttPSM) form their patterns through adjacent areas of quartz and, for example, molybdenum silicide (MoSi). Unlike chrome, MoSi ... ,-mask, T-APSM) 展現出相較於傳統相位移. 光罩更好的性能，包括增進景深(depth of focus) 與. 解析度(resolution) 等，因為它能在圖案邊緣造成. 更強的破壞性干涉(2)。因此 ...
| 相關軟體 Etcher 資訊 | |
|---|---|
 Apsm mask 相關參考資料
absorptive phase shift mask=APSM} - 吸收相移光罩
吸收相移光罩. absorptive phase shift mask=APSM}. 以absorptive phase shift mask=APSM} 進行詞彙精確檢索結果. 出處/學術領域, 英文詞彙, 中文詞彙. 學術名詞 https://terms.naer.edu.tw EUVL alternating phase shift mask - SPIE Digital Library
由 PY Yan 著作 · 2011 · 被引用 12 次 — The fabrication of EUVL APSM is more difficult than either the fabrication of an EUVL binary mask or a conventional optical APSM mask. In the ... https://www.spiedigitallibrary Lithography using alternating phase shift mask - Lumerical ...
Another type of mask, the alternating phase shift mask (APSM), controls the phase of the incident light by changing the thickness of the transparent regions of ... https://support.lumerical.com loading - 博碩士論文網
衰減式相移光罩(attenuated phase-shifting mask，APSM)能增進解析度(resolution)及景深(depth of focus)，亦可克服傳統相移式光罩的相位衝突的問題。 https://ndltd.ncl.edu.tw MEEF for APSM mask with fixed line width 45nm and different...
The use of Alternating Phase Shifting Masks (APSM) for sub 50nm half pitch pattern using 193nm lithography was evaluated. Results show that polarized ... https://www.researchgate.net Phase-shift mask - Wikipedia
Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography. https://en.wikipedia.org Phase-Shift Masks - SPIE
由 CA Mack 著作 · 2006 · 被引用 148 次 — Alternating phase-shift masks (AltPSM) are used to print narrow lines in positive photoresist by making the clear areas on either side of the line of opposite ... https://spie.org Types of Phase-Shifting Mask (PSM) - Ron Maltiel, expert ...
Attenuated Phase Shift Masks (AttPSM) form their patterns through adjacent areas of quartz and, for example, molybdenum silicide (MoSi). Unlike chrome, MoSi ... http://maltiel-consulting.com 用於次25 奈米極紫外光曝光機之新穎反射型衰減式相位移光罩
-mask, T-APSM) 展現出相較於傳統相位移. 光罩更好的性能，包括增進景深(depth of focus) 與. 解析度(resolution) 等，因為它能在圖案邊緣造成. 更強的破壞性干涉(2)。因此 ... https://www.tiri.narl.org.tw |