swing curve photoresist
由 CA Mack 著作 · 被引用 31 次 — photoresist contrast curves, swing curves, and focus-exposure matrices. For each data type, physics-based algebraic equations will be proposed to fit to the ... ,由 CA Mack 著作 · 1999 · 被引用 31 次 — photoresist contrast curves, swing curves, and focus-exposure matrices. For each data type, physics-based algebraic equations will be proposed to fit to the ... ,curve will be evaluated by varying the control inputs of resist thickness and ... Generate a swing curve by plotting photoresist thickness versus Eo ... ,,The characteristic curve generated by mapping the dose to clear (or dose to size for a given CD) vs. film thickness is known as the “swing curve”. ,2008年10月1日 — Another source of CD variation due to changing resist thickness: interference effect. This effect is peculiar to optical lithography using ...,由 CA Mack 著作 · 被引用 12 次 — The result was thin film interference effects including standing waves. The existence and importance of standing waves in lithography were reported just as ...,
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 swing curve photoresist 相關參考資料
Data Analysis for Photolithography
由 CA Mack 著作 · 被引用 31 次 — photoresist contrast curves, swing curves, and focus-exposure matrices. For each data type, physics-based algebraic equations will be proposed to fit to the ... http://www.lithoguru.com Data Analysis for Photolithography - ScienceDirect.com
由 CA Mack 著作 · 1999 · 被引用 31 次 — photoresist contrast curves, swing curves, and focus-exposure matrices. For each data type, physics-based algebraic equations will be proposed to fit to the ... https://www.sciencedirect.com Dose-to-Clear Swing Curves for Process Optimization
curve will be evaluated by varying the control inputs of resist thickness and ... Generate a swing curve by plotting photoresist thickness versus Eo ... http://diyhpl.us Lecture 47 (CHE 323) Lithography Standing Waves - YouTube
https://www.youtube.com Reflectivity Control in Lithography - iMicromaterials
The characteristic curve generated by mapping the dose to clear (or dose to size for a given CD) vs. film thickness is known as the “swing curve”. https://imicromaterials.com Swing Curve Effect
2008年10月1日 — Another source of CD variation due to changing resist thickness: interference effect. This effect is peculiar to optical lithography using ... http://myplace.frontier.com Swing Curves
由 CA Mack 著作 · 被引用 12 次 — The result was thin film interference effects including standing waves. The existence and importance of standing waves in lithography were reported just as ... http://lithoguru.com Swing Curves and the Process Window
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