soi antenna effect

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soi antenna effect

The antenna effect, more formally plasma induced gate oxide damage, is an effect that can potentially cause yield and reliability problems during the ... ,antenna situations on the chip and their potential impact on the gate oxide is studied. thickness ranging from 2.0 to 2.5 nm. ... structures have been designed in which full flow antennas of three ratios are connected in various combinations (Table I ) to,very large antenna ratios may be successfully fabricated without damage, proviided that antennas with different electron shading effects on gate than on ... ,... the Fully Depleted SOI devices by attaching different antennas configurations ... that some configuration induces gate dielectric breakdown by charging effect. ,2017年8月24日 — The damages comprise plasma charging damages that particularly occur when electrical charges are collected from the plasma by the gate ... ,2020年10月3日 — Request PDF | SOI chip design and charging damage | In this paper we discuss some aspects of antennas in real designs in SOI technology, and ... chips, where second-order effects such as resistance and the details of the ... ,2019年8月23日 — lected by S/D may deteriorate device characteristics in SOI devices. In this paper, we will study the antenna effect and report new findings about ... ,this plasma charge collected by S/D may deteriorate device characteristics in SOI devices. In this paper, we will study the antenna effect and report new findings ... ,It is provided a semiconductor device comprising a power line, a Silicon-on-Insulator, SOI, substrate comprising a semiconductor layer and a semiconductor bulk ... ,We designed antenna test vehicles, fabricated advanced CMOS devices involving ... We showed that the SOI MOSFETs depict less damage impacts on NBTI of ...

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soi antenna effect 相關參考資料
Antenna effect - Wikipedia

The antenna effect, more formally plasma induced gate oxide damage, is an effect that can potentially cause yield and reliability problems during the ...

https://en.wikipedia.org

Plasma Charging Damage Immunity in SOI Devices - Confit

antenna situations on the chip and their potential impact on the gate oxide is studied. thickness ranging from 2.0 to 2.5 nm. ... structures have been designed in which full flow antennas of three rat...

https://confit.atlas.jp

Plasma charging damage in SOI technology - IEEE Xplore

very large antenna ratios may be successfully fabricated without damage, proviided that antennas with different electron shading effects on gate than on ...

https://ieeexplore.ieee.org

Plasma process inducing gate oxide breakdown in the FDSOI ...

... the Fully Depleted SOI devices by attaching different antennas configurations ... that some configuration induces gate dielectric breakdown by charging effect.

https://ieeexplore.ieee.org

REDUCING ANTENNA EFFECTS IN SOI DEVICES ...

2017年8月24日 — The damages comprise plasma charging damages that particularly occur when electrical charges are collected from the plasma by the gate ...

https://www.freepatentsonline.

SOI chip design and charging damage | Request PDF

2020年10月3日 — Request PDF | SOI chip design and charging damage | In this paper we discuss some aspects of antennas in real designs in SOI technology, and ... chips, where second-order effects such as...

https://www.researchgate.net

The Study of Plasma Induced Damage on 65 ... - IEEE Xplore

2019年8月23日 — lected by S/D may deteriorate device characteristics in SOI devices. In this paper, we will study the antenna effect and report new findings about ...

https://ieeexplore.ieee.org

The Study of Plasma Induced Damage on 65-nm Silicon on ...

this plasma charge collected by S/D may deteriorate device characteristics in SOI devices. In this paper, we will study the antenna effect and report new findings ...

https://ieeexplore.ieee.org

US20170243894A1 - Reducing antenna effects in soi devices ...

It is provided a semiconductor device comprising a power line, a Silicon-on-Insulator, SOI, substrate comprising a semiconductor layer and a semiconductor bulk ...

https://patents.google.com

國立交通大學機構典藏:電漿製程導致先進互補式金氧半場效電 ...

We designed antenna test vehicles, fabricated advanced CMOS devices involving ... We showed that the SOI MOSFETs depict less damage impacts on NBTI of ...

https://ir.nctu.edu.tw