ruthenium nitride
The pH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were deposited from a ... ,RuN films that crystallized in the ZnS-like structure with [1 1 1] preferred orientation have been deposited by reactive sputtering. Preliminary results are reported ... ,chemical vapor deposition (CVD) grown ruthenium films on 0.5 and 1 nm thick metal nitride (TiN, TaN) barrier layers deposited via atomic layer deposition (ALD) ... , The NaCl-type RuNx≈1 (space group: Fm-3m) was suggested by Moreno-Armenta et al. using reactive pulsed laser ablation, in which ...,Ruthenium (Ru) and ruthenium nitride (RuN) thin films have been investigated as candidates for barrier layers in copper (Cu) damascene processes. In order to ... , The pH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were ...,The pH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were deposited from a ... ,The recent synthesis of platinum nitride opens the possibility of novel platinum-group metal nitrides to exist. In this work we report the synthesis of ruthenium ...
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 ruthenium nitride 相關參考資料
(PDF) Fabrication and Characterization of a Ruthenium Nitride ...
The pH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were deposited from a ... https://www.researchgate.net Application of sputtered ruthenium nitride thin films as ...
RuN films that crystallized in the ZnS-like structure with [1 1 1] preferred orientation have been deposited by reactive sputtering. Preliminary results are reported ... https://www.sciencedirect.com Atomic layer deposited ultra-thin metal nitride barrier layers for ...
chemical vapor deposition (CVD) grown ruthenium films on 0.5 and 1 nm thick metal nitride (TiN, TaN) barrier layers deposited via atomic layer deposition (ALD) ... https://avs.scitation.org Diverse ruthenium nitrides stabilized under pressure: a ...
The NaCl-type RuNx≈1 (space group: Fm-3m) was suggested by Moreno-Armenta et al. using reactive pulsed laser ablation, in which ... https://www.nature.com Effect of Annealing on the Microstructure and Electrical ...
Ruthenium (Ru) and ruthenium nitride (RuN) thin films have been investigated as candidates for barrier layers in copper (Cu) damascene processes. In order to ... https://ir.nctu.edu.tw Fabrication and Characterization of a Ruthenium Nitride ...
The pH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were ... https://www.ncbi.nlm.nih.gov Nanometric structures of ruthenium nitride thin films by SEM ...
The pH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were deposited from a ... https://www.researchgate.net Synthesis of cubic ruthenium nitride by reactive pulsed laser ...
The recent synthesis of platinum nitride opens the possibility of novel platinum-group metal nitrides to exist. In this work we report the synthesis of ruthenium ... https://www.sciencedirect.com |