kla tencor metrology tools
Semiconductor metrology is a critical discipline in the production of high performance, reliable metrology tools and devices. Whether verifying that a design will be manufacturable, characterizing a new process, or monitoring high-volume manufacturing pro,Product Description. The Archer™ 600 is a high performance optical overlay metrology system that serves as an independent source of overlay metrology data ... ,Semiconductor metrology is a critical discipline in the production of high performance, reliable metrology tools and devices. Whether verifying that a design will be manufacturable, characterizing a new process, or monitoring high-volume manufacturing pro,KLA-Tencor's wafer manufacturing systems include wafer inspection tools, metrology and data management systems. ,SAN JOSE, Calif., Feb. 23, 2004--KLA-Tencor today introduced SpectraCD™100--its next-generation inline optical CD metrology system for advanced patterning process control at the 90-nm and 65-nm nodes.Based on KLA-Tencor's widely adopted spectroscopic ,The LMS IPRO7 mask registration metrology tool is designed to accurately verify pattern placement performance of reticles for the 7nm node. It offers comprehensive characterization of reticle pattern placement error, which is a direct contributor to intra,Product Description. Enables control of overlay error budget for sub-0.13-micron production. Provides a 30 percent increase in throughput over previous generation tools. Allows consistent, reliable and robust measurement of low-contrast targets, including,Links at the left are organized by industry and application to help you navigate our extensive portfolio of current inspection and metrology equipment and products. In addition, our K-T Certified section describes fully refurbished and tested KLA-Tencor p,The ATL™ (Accurate Tunable Laser) is a high performance scatterometry-based overlay metrology system designed to meet the required accuracy and process robustness ... For information on the Archer Series of overlay metrology tools that support high perfor,December 17, 2007 -- KLA-Tencor Corporation (NASDAQ: KLAC) has introduced a unique application for its SensArray™ wafer-level metrology tools, called PlasmaWafer™ Suite, that provides chipmakers and etch equipment suppliers with an easy-to-use measurement
相關軟體 yEd 資訊 | |
---|---|
![]() kla tencor metrology tools 相關參考資料
Metrology Solutions and Tools - KLA-Tencor
Semiconductor metrology is a critical discipline in the production of high performance, reliable metrology tools and devices. Whether verifying that a design will be manufacturable, characterizing a n... https://www.kla-tencor.com Archer Series Optical Overlay Metrology Tools ... - KLA-Tencor
Product Description. The Archer™ 600 is a high performance optical overlay metrology system that serves as an independent source of overlay metrology data ... https://www.kla-tencor.com Semiconductor Metrology Solutions and Tools - KLA-Tencor
Semiconductor metrology is a critical discipline in the production of high performance, reliable metrology tools and devices. Whether verifying that a design will be manufacturable, characterizing a n... https://www.kla-tencor.com Wafer Manufacturing Inspection Tools - Wafer Inspection ... - KLA-Tencor
KLA-Tencor's wafer manufacturing systems include wafer inspection tools, metrology and data management systems. https://www.kla-tencor.com New Optical CD Metrology Tool From KLA-Tencor Provides Inline ...
SAN JOSE, Calif., Feb. 23, 2004--KLA-Tencor today introduced SpectraCD™100--its next-generation inline optical CD metrology system for advanced patterning process control at the 90-nm and 65-nm nodes.... https://www.kla-tencor.com IPRO Series Mask Metrology Systems | LMS IPRO7 ... - KLA-Tencor
The LMS IPRO7 mask registration metrology tool is designed to accurately verify pattern placement performance of reticles for the 7nm node. It offers comprehensive characterization of reticle pattern ... https://www.kla-tencor.com Archer 10 Automated Optical Overlay Metrology ... - KLA-Tencor
Product Description. Enables control of overlay error budget for sub-0.13-micron production. Provides a 30 percent increase in throughput over previous generation tools. Allows consistent, reliable an... https://www.kla-tencor.com Defect Inspection and Metrology Equipment, Products ... - KLA-Tencor
Links at the left are organized by industry and application to help you navigate our extensive portfolio of current inspection and metrology equipment and products. In addition, our K-T Certified sect... https://www.kla-tencor.com ATL Overlay Metrology System | Scatterometry ... - KLA-Tencor
The ATL™ (Accurate Tunable Laser) is a high performance scatterometry-based overlay metrology system designed to meet the required accuracy and process robustness ... For information on the Archer Ser... https://www.kla-tencor.com KLA-Tencor Extends Metrology Portfolio with SensArray Etch ...
December 17, 2007 -- KLA-Tencor Corporation (NASDAQ: KLAC) has introduced a unique application for its SensArray™ wafer-level metrology tools, called PlasmaWafer™ Suite, that provides chipmakers and e... https://www.kla-tencor.com |