ion flux density
PDF | An in-situ coil implemented in a confocal magnetron sputtering system is used to modify the ion flux impacting the substrate, thereby ...,In this work, an anode layer ion source (ALIS) is used in magnetron sputtering to deposit TiN films and the effects of the average energy Ei and ion flux density Ji ... ,Flux describes any effect that appears to pass or travel through a surface or substance. A flux is either a concept based in physics or used with applied ... ,Ion flux, ion energy distribution and neutral density in an inductively coupled argon discharge. To cite this article: T Chevolleau and W Fukarek 2000 Plasma ... ,Measured ion flux density and mean ion energy at the grounded electrode as a function of the driving voltage amplitude for different magnetic flux densities ... , The influence of the ion flux density on the properties of molybdenum films deposited from the vapour phase under simultaneous argon ion ..., Tunable ion flux density and its impact on AlN thin films deposited in a confocal DC magnetron sputtering system. M. Tranta,*, M. Fischera, ..., Residual stress of AlN films changes from 0.9 GPa to −4 GPa with increasing ion flux density. •. Evolution from open to closed grain boundary ...
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 ion flux density 相關參考資料
(PDF) Tunable ion flux density and its impact on AlN thin films ...
PDF | An in-situ coil implemented in a confocal magnetron sputtering system is used to modify the ion flux impacting the substrate, thereby ... https://www.researchgate.net Effects of ion flux density and energy on the ... - ScienceDirect.com
In this work, an anode layer ion source (ALIS) is used in magnetron sputtering to deposit TiN films and the effects of the average energy Ei and ion flux density Ji ... https://www.sciencedirect.com Flux density - Wikipedia
Flux describes any effect that appears to pass or travel through a surface or substance. A flux is either a concept based in physics or used with applied ... https://en.wikipedia.org Ion flux, ion energy distribution and neutral density in an ... - IOPscience
Ion flux, ion energy distribution and neutral density in an inductively coupled argon discharge. To cite this article: T Chevolleau and W Fukarek 2000 Plasma ... http://iopscience.iop.org Measured ion flux density and mean ion energy at the grounded ...
Measured ion flux density and mean ion energy at the grounded electrode as a function of the driving voltage amplitude for different magnetic flux densities ... https://www.researchgate.net The influence of the ion flux density on the properties of molybdenum ...
The influence of the ion flux density on the properties of molybdenum films deposited from the vapour phase under simultaneous argon ion ... https://www.sciencedirect.com Tunable ion flux density and its impact on AlN thin ... - ResearchGate
Tunable ion flux density and its impact on AlN thin films deposited in a confocal DC magnetron sputtering system. M. Tranta,*, M. Fischera, ... https://www.researchgate.net Tunable ion flux density and its impact on AlN thin films deposited in a ...
Residual stress of AlN films changes from 0.9 GPa to −4 GPa with increasing ion flux density. •. Evolution from open to closed grain boundary ... https://www.sciencedirect.com |