inductively coupled source
Properties of inductively coupled plasma source with helical coil. Abstract: This paper presents modeling and experimental results of the voltage, current, and ... ,An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) is a type of plasma source in which the energy is supplied by electric currents which ... , Inductively coupled plasma (ICP) sources meeting these demands started to be investigated in the 1990s, eventually becoming widely used in ...,These techniques include inductively coupled plasma (ICP) and direct coupled plasma (DCP). Plasma sources offers several advantages compared with flame ... ,PDF | The principle of inductively coupled plasma (ICP) and perspective of ICP development are reviewed. Multispiral coil ICP (MSC-ICP), which has the ... ,Inductively coupled plasma (ICP) sources are becoming increasingly popular for etching submicrometer features, soft‐cleans for physical vapor deposition ... ,A large-area inductively coupled plasma (ICP) source capable of securing azimuthal plasma uniformity at a 40.00MHz has been developed. The antenna ... ,This article presents a new approach to investigate and model the electrical characteristics of inductive plasma sources. The technique is primarily based on the ...
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 inductively coupled source 相關參考資料
Properties of inductively coupled plasma source with helical coil ...
Properties of inductively coupled plasma source with helical coil. Abstract: This paper presents modeling and experimental results of the voltage, current, and ... https://ieeexplore.ieee.org Inductively coupled plasma - Wikipedia
An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) is a type of plasma source in which the energy is supplied by electric currents which ... https://en.wikipedia.org Inductively Coupled Plasma Sources and Applications - Hindawi
Inductively coupled plasma (ICP) sources meeting these demands started to be investigated in the 1990s, eventually becoming widely used in ... https://www.hindawi.com Inductively coupled plasma | HiQ
These techniques include inductively coupled plasma (ICP) and direct coupled plasma (DCP). Plasma sources offers several advantages compared with flame ... http://hiq.linde-gas.com (PDF) Inductively Coupled Plasma Sources and Applications
PDF | The principle of inductively coupled plasma (ICP) and perspective of ICP development are reviewed. Multispiral coil ICP (MSC-ICP), which has the ... https://www.researchgate.net Modeling an inductively coupled plasma source: Journal of Vacuum ...
Inductively coupled plasma (ICP) sources are becoming increasingly popular for etching submicrometer features, soft‐cleans for physical vapor deposition ... https://avs.scitation.org Development of 40 MHz inductively coupled plasma source and ...
A large-area inductively coupled plasma (ICP) source capable of securing azimuthal plasma uniformity at a 40.00MHz has been developed. The antenna ... https://aip.scitation.org Determination of the equivalent circuit of inductively coupled plasma ...
This article presents a new approach to investigate and model the electrical characteristics of inductive plasma sources. The technique is primarily based on the ... https://aip.scitation.org |