antenna effect plasma etching
,In this paper, antenna effect is seriously damage gate oxide in the 0.13um FLASH ... Degradation from Wafer Charging in Plasma Etching,”IEDM Tech. Dig. ,antenna ratio is much lower than that at the conductor etch, although no electron shading effect was observed. Thus, plasma damage during contact or via hole ... ,silicon thin-film transistors (LTPS TFTs). The LTPS TFTs having different antenna structures were used to study the effects of the plasma-etching process. ,Note. Plasma etching antenna effect on oxide-silicon interface reliability. Author links open overlay panelHyungcheol ... ,During the fabrication process, we need to etch out the unwanted oxide layer from the wafer, which can be done using plasma etching. Plasma contains high ... ,A method of semiconductor fabrication that reduces an antenna effect that can occur during a plasma etching procedure. The semiconductor device has circuitry ... ,“antenna”. The effect of amplifying the tunnelling current density across the gate- ... Figure 1.2: Schematic view of discharging paths during plasma etching of ...
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 antenna effect plasma etching 相關參考資料
Antenna effect - Wikipedia
https://en.wikipedia.org 國立交通大學機構典藏
In this paper, antenna effect is seriously damage gate oxide in the 0.13um FLASH ... Degradation from Wafer Charging in Plasma Etching,”IEDM Tech. Dig. https://ir.nctu.edu.tw Plasma charging damage during contact hole etch in high ...
antenna ratio is much lower than that at the conductor etch, although no electron shading effect was observed. Thus, plasma damage during contact or via hole ... https://ir.nctu.edu.tw Plasma-Induced Damage on the Performance and Reliability ...
silicon thin-film transistors (LTPS TFTs). The LTPS TFTs having different antenna structures were used to study the effects of the plasma-etching process. https://ir.nctu.edu.tw Plasma etching antenna effect on oxide-silicon interface ...
Note. Plasma etching antenna effect on oxide-silicon interface reliability. Author links open overlay panelHyungcheol ... https://www.sciencedirect.com Antenna Effect in 16nm Technology Node - Design And Reuse
During the fabrication process, we need to etch out the unwanted oxide layer from the wafer, which can be done using plasma etching. Plasma contains high ... https://www.design-reuse.com US5910452A - Method for reducing antenna effect during ...
A method of semiconductor fabrication that reduces an antenna effect that can occur during a plasma etching procedure. The semiconductor device has circuitry ... https://patents.google.com Detection of and Protection against Plasma Charging Damage ...
“antenna”. The effect of amplifying the tunnelling current density across the gate- ... Figure 1.2: Schematic view of discharging paths during plasma etching of ... https://research.utwente.nl |