Tungsten etching
由 P Verdonck 著作 · 1995 · 被引用 21 次 — Tungsten and polysilicon layers were etched in three different types of etching equipment, in different etching modes. Etch rates and wall profiles were determined. ,Strong H2O2 will etch tungsten. 12% showed some effects, most people use 30% at 50 C. FeCl3 won't etch tungsten. I just put a 19 um diameter wire in FeCl3 to ... ,由 WS Pan 著作 · 1988 · 被引用 20 次 — A vertical‐to‐lateral etch ratio of 4:1 was measured with CHF3/70%O2, 200 W, 10 mTorr, 20 sccm. The etching mechanisms of tungsten due to chemical and ... ,2020年1月28日 — Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using O2 or O3 for oxidation and WCl6 as the ... ,Tungsten etchant; Synonyms: Tungsten etch; find Sigma-Aldrich-667498 MSDS, related peer-reviewed papers, technical documents, similar products & more at ... ,In situ x‐ray photoelectron spectroscopy (XPS), etch rate measurements, and optical emission spectroscopy have been used to examine the etching ... ,由 T Morel 著作 · 2008 · 被引用 9 次 — Tungsten metal gate etching in Cl2∕O2 inductively coupled high density plasmas. Journal of Vacuum Science & Technology B: Microelectronics and ... ,The tungsten nitride is etched during the same etch process as tl e tungsten. Therefore, as used herein, the term tungsten layer refers to a layer of tungsten, ...
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 Tungsten etching 相關參考資料
Analysis of The Etching Mechanisms of Tungsten in Fluorine ...
由 P Verdonck 著作 · 1995 · 被引用 21 次 — Tungsten and polysilicon layers were etched in three different types of etching equipment, in different etching modes. Etch rates and wall profiles were determin... https://iopscience.iop.org I am searching for an etchant which can etch Tungsten (W) but ...
Strong H2O2 will etch tungsten. 12% showed some effects, most people use 30% at 50 C. FeCl3 won't etch tungsten. I just put a 19 um diameter wire in FeCl3 to ... https://www.researchgate.net Selective reactive ion etching of tungsten films in CHF3 and ...
由 WS Pan 著作 · 1988 · 被引用 20 次 — A vertical‐to‐lateral etch ratio of 4:1 was measured with CHF3/70%O2, 200 W, 10 mTorr, 20 sccm. The etching mechanisms of tungsten due to chemical and ... https://avs.scitation.org Thermal atomic layer etching of metallic tungsten via oxidation ...
2020年1月28日 — Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using O2 or O3 for oxidation and WCl6 as the ... https://avs.scitation.org Tungsten etchant - Sigma-Aldrich
Tungsten etchant; Synonyms: Tungsten etch; find Sigma-Aldrich-667498 MSDS, related peer-reviewed papers, technical documents, similar products & more at ... https://www.sigmaaldrich.com Tungsten etching mechanisms in CF4O2 reactive ion etching ...
In situ x‐ray photoelectron spectroscopy (XPS), etch rate measurements, and optical emission spectroscopy have been used to examine the etching ... https://aip.scitation.org Tungsten metal gate etching in Cl2∕O2 inductively coupled ...
由 T Morel 著作 · 2008 · 被引用 9 次 — Tungsten metal gate etching in Cl2∕O2 inductively coupled high density plasmas. Journal of Vacuum Science & Technology B: Microelectronics and ... https://avs.scitation.org WO2002065539A1 - Method of etching tungsten or tungsten ...
The tungsten nitride is etched during the same etch process as tl e tungsten. Therefore, as used herein, the term tungsten layer refers to a layer of tungsten, ... https://www.google.com |