Titanium nitride resistivity

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Titanium nitride resistivity

Titanium nitride (TiNx) thin films, ∼100 nm thick, were deposited on Si(100) ... The low resistivity (43 μΩ cm), combined with the high hardness and elastic ... ,We report the electrical resistivity of titanium nitride thin films prepared by ion beam-assisted deposition technique in the temperature range 77⩽T⩽300 K. The ... , ,2020年3月16日 — ABSTRACT · Titanium nitride (TiN) is a metallic compound with a bulk resistivity of ∼13 μΩ cm at room temperature. 1. J. S. Chawla, X. Y. Zhang ... ,Nanocrystalline thin films of titanium nitride and titanium aluminium nitride were ... Structural properties and electrical resistivity of TiNx and Ti1−xAlxN films ... ,In particular, the specimens evaporated at pN=2.0×10-5 Torr and Ts=500°C had maximum resistivity of 270 µΩ-cm and a very small negative value of the ... ,It was introduced by Nicolet in the 1970's. Titanium nitride is a hard, dense, refractory material with unusually high electrical conductivity. TiN is very hard and has a ... ,In this context, TiN is classified as a "barrier metal" (electrical resistivity ~ 25 µΩ·cm), even though it is clearly a ceramic from the perspective of chemistry or ...

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Titanium nitride resistivity 相關參考資料
Combined electrical and mechanical properties of titanium ...

Titanium nitride (TiNx) thin films, ∼100 nm thick, were deposited on Si(100) ... The low resistivity (43 μΩ cm), combined with the high hardness and elastic ...

https://aip.scitation.org

Electrical resistivity of titanium nitride thin films prepared by ...

We report the electrical resistivity of titanium nitride thin films prepared by ion beam-assisted deposition technique in the temperature range 77⩽T⩽300 K. The ...

https://www.sciencedirect.com

Material: Titanium Nitride (TiN), bulk - MEMS Clearinghouse

https://www.memsnet.org

Role of temperature on structure and electrical properties of ...

2020年3月16日 — ABSTRACT · Titanium nitride (TiN) is a metallic compound with a bulk resistivity of ∼13 μΩ cm at room temperature. 1. J. S. Chawla, X. Y. Zhang ...

https://avs.scitation.org

Structural properties and electrical resistivity of TiNx and Ti1 ...

Nanocrystalline thin films of titanium nitride and titanium aluminium nitride were ... Structural properties and electrical resistivity of TiNx and Ti1−xAlxN films ...

http://doi.org

Structure and Electrical Properties of Titanium Nitride Films ...

In particular, the specimens evaporated at pN=2.0×10-5 Torr and Ts=500°C had maximum resistivity of 270 µΩ-cm and a very small negative value of the ...

https://iopscience.iop.org

Titanium Nitride - Enigmatics

It was introduced by Nicolet in the 1970's. Titanium nitride is a hard, dense, refractory material with unusually high electrical conductivity. TiN is very hard and has a ...

http://www.enigmatic-consultin

Titanium nitride - Wikipedia

In this context, TiN is classified as a "barrier metal" (electrical resistivity ~ 25 µΩ·cm), even though it is clearly a ceramic from the perspective of chemistry or ...

https://en.wikipedia.org