Silicon anisotropic etching
The model suggested that anisotropic etching was fundamentally caused by differences in the densities of dangling bonds and back bonds on the silicon surface. . ,由 H Seidel 著作 · 1990 · 被引用 2458 次 — Based on these results, an electrochemical model is proposed, describing the anisotropic etching behavior of silicon in all alkaline solutions. In an oxidation ... ,由 KE Bean 著作 · 1978 · 被引用 1241 次 — Anisotropic etching of (100) orientation silicon is being widely used today and (110) orientation technology is emerging. This paper discusses both orientation- ... ,A ternary liquid etchant solution for silicon, consisting of hydrazine, iso‐2‐propyl alcohol (IPA), and water has been studied in some detail. ,Anisotropic etching of silicon is a key technology for fabricating various three dimensional structures for micro-electromechanical systems (MEMS). ,由 K Sato 著作 · 1999 · 被引用 236 次 — We evaluated orientation dependence in the etching rate of single-crystal silicon for tetramethyl-ammonium-hydroxide (TMAH) water solutions. ,由 P Pal 著作 · 2021 · 被引用 69 次 — Several methods have been proposed to increase the etch rate of silicon in wet anisotropic etchants either by physical means (e.g. agitation, ... ,2023年5月23日 — Isotropic silicon wet etching is a method that removes material evenly in all directions from a silicon substrate. It's often used for creating ... ,由 S Purohit 著作 · 2022 · 被引用 2 次 — Silicon wet anisotropic etching is usually carried out in alkaline solution, which can be either an organic (e.g., tetramethylammonium hydroxide ...
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 Silicon anisotropic etching 相關參考資料
(PDF) Anisotropic Etching of Crystalline Silicon in Alkaline ...
The model suggested that anisotropic etching was fundamentally caused by differences in the densities of dangling bonds and back bonds on the silicon surface. . https://www.researchgate.net Anisotropic Etching of Crystalline Silicon in Alkaline Solutions
由 H Seidel 著作 · 1990 · 被引用 2458 次 — Based on these results, an electrochemical model is proposed, describing the anisotropic etching behavior of silicon in all alkaline solutions. In an oxidatio... https://iopscience.iop.org Anisotropic etching of silicon
由 KE Bean 著作 · 1978 · 被引用 1241 次 — Anisotropic etching of (100) orientation silicon is being widely used today and (110) orientation technology is emerging. This paper discusses both orientation... https://ieeexplore.ieee.org Anisotropic Etching of Silicon - AIP Publishing
A ternary liquid etchant solution for silicon, consisting of hydrazine, iso‐2‐propyl alcohol (IPA), and water has been studied in some detail. https://pubs.aip.org Anisotropic Etching of Silicon in TMAH Solutions
Anisotropic etching of silicon is a key technology for fabricating various three dimensional structures for micro-electromechanical systems (MEMS). https://sensors.myu-group.co.j Anisotropic etching rates of single-crystal silicon for TMAH ...
由 K Sato 著作 · 1999 · 被引用 236 次 — We evaluated orientation dependence in the etching rate of single-crystal silicon for tetramethyl-ammonium-hydroxide (TMAH) water solutions. https://www.sciencedirect.com High speed silicon wet anisotropic etching for applications in ...
由 P Pal 著作 · 2021 · 被引用 69 次 — Several methods have been proposed to increase the etch rate of silicon in wet anisotropic etchants either by physical means (e.g. agitation, ... https://mnsl-journal.springero Isotropic and Anisotropic Silicon Wet Etching Processes
2023年5月23日 — Isotropic silicon wet etching is a method that removes material evenly in all directions from a silicon substrate. It's often used for creating ... https://www.modutek.com Wet anisotropic etching characteristics of Si111} in NaOH ...
由 S Purohit 著作 · 2022 · 被引用 2 次 — Silicon wet anisotropic etching is usually carried out in alkaline solution, which can be either an organic (e.g., tetramethylammonium hydroxide ... https://mnsl-journal.springero |