Electron shading effect
PDF | In this work, a CHARM-2 wafer with high aspect ratio resist patterns has been used to quantitatively characterize the electron-shading effect in a... | Find ... ,These results prove the electron shading model: the photoresist patterns shade the antenna from electrons of oblique incidence, resulting in local charging ... ,The oxide degradation due to edge and electron shading effects is investigated in a pulse-modulated plasma using metal-oxide-silicon (MOS) and ... ,Plasma charging damage to transistors due to electron shading has been widely discussed in the literature [1]. Although countless papers present damage ... ,Electron shading effects in high density plasma processing for very high aspect ratio structures. Abstract: Numerical simulations of feature scale charging due to ... ,characterize the electron-shading effect in a HDP oxide etch reactor. Moreover, we show by the decrease of the maximum collected current that an ion shading ... ,Electron Shading Effects During Oxide Etching in Uniform and Non-Uniform Plasmas. Wes Lukaszek1 and Jeffrey Shields2. 1Wafer Charging Monitors, Inc., 127 ... , ,的電子遮蔽效應(electron shading effect). (註: 電子遮蔽效應- 電漿蝕刻時，若是天. 線密度過高，質量小的電子容易被散射到. 其他區域﹔而質量大的帶正電電漿離子則.
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 Electron shading effect 相關參考資料
(PDF) Electron-shading characterization in a HDP contact ...
PDF | In this work, a CHARM-2 wafer with high aspect ratio resist patterns has been used to quantitatively characterize the electron-shading effect in a... | Find ... https://www.researchgate.net Charge Damage Caused by Electron Shading Effect ...
These results prove the electron shading model: the photoresist patterns shade the antenna from electrons of oblique incidence, resulting in local charging ... https://iopscience.iop.org Effect of Electron Shading on Gate Oxide Degradation ...
The oxide degradation due to edge and electron shading effects is investigated in a pulse-modulated plasma using metal-oxide-silicon (MOS) and ... https://iopscience.iop.org Electron Shading Effects During Oxide Etching in Uniform and ...
Plasma charging damage to transistors due to electron shading has been widely discussed in the literature [1]. Although countless papers present damage ... https://pdfs.semanticscholar.o Electron shading effects in high density plasma processing for ...
Electron shading effects in high density plasma processing for very high aspect ratio structures. Abstract: Numerical simulations of feature scale charging due to ... http://ieeexplore.ieee.org Electron-Shading Characterization in a HDP Contact Etching ...
characterize the electron-shading effect in a HDP oxide etch reactor. Moreover, we show by the decrease of the maximum collected current that an ion shading ... http://charm-2.com Electron-Shading Effects During Oxide Etching - Wafer ...
Electron Shading Effects During Oxide Etching in Uniform and Non-Uniform Plasmas. Wes Lukaszek1 and Jeffrey Shields2. 1Wafer Charging Monitors, Inc., 127 ... http://www.charm-2.com Ion Shading Effects during Metal Etch in Plasma ... - UCLA.edu
http://www.seas.ucla.edu 利用電荷幫浦分佈法研究深次微米N 型MOS 元件電漿製程傷害 ...
的電子遮蔽效應(electron shading effect). (註: 電子遮蔽效應- 電漿蝕刻時，若是天. 線密度過高，質量小的電子容易被散射到. 其他區域﹔而質量大的帶正電電漿離子則. https://ir.nctu.edu.tw |