Bevel Clean
Plasma Bevel Clean. Advanced Memory, Interconnect, Patterning, Transistor. 晶邊清洗可在製程步驟之間把晶圓邊緣上不要的罩幕(mask)、殘留物和薄膜去除。 ,Technology: Plasma Bevel Clean. CORONUS系列產品. Plasma Bevel Clean. 這些晶邊清洗系列產品可去除晶圓邊緣上的不必要材料，保護有效晶粒區域以提升晶 ... ,Plasma Bevel Clean. These bevel clean systems remove unwanted materials from the wafer's edge while protecting the active die area to enhance die yield. ,CORONUS系列產品. Plasma Bevel Clean. 這些晶邊清洗系列產品可去除晶圓邊緣上的不必要材料，保護 ... ,Wet processing technologies can be used for wafer cleaning as well as strip and etch applications. Plasma bevel cleaning is used to enhance die yield by ... ,An apparatus for removing material on a bevel of a wafer is provided. A wafer support with a diameter that is less than the diameter of the wafer, wherein the ... ,US8137501B2 * 2007-02-08 2012-03-20 Lam Research Corporation Bevel clean device. US7981307B2 * 2007-10-02 2011-07-19 Lam Research Corporation ...
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 Bevel Clean 相關參考資料
CORONUS系列產品- Lam Research
Plasma Bevel Clean. Advanced Memory, Interconnect, Patterning, Transistor. 晶邊清洗可在製程步驟之間把晶圓邊緣上不要的罩幕(mask)、殘留物和薄膜去除。 https://www.lamresearch.com Plasma Bevel Clean Archives - Lam Research
Technology: Plasma Bevel Clean. CORONUS系列產品. Plasma Bevel Clean. 這些晶邊清洗系列產品可去除晶圓邊緣上的不必要材料，保護有效晶粒區域以提升晶 ... https://www.lamresearch.com Plasma Bevel Clean Archives - Lam Research - MyLam
Plasma Bevel Clean. These bevel clean systems remove unwanted materials from the wafer's edge while protecting the active die area to enhance die yield. https://mylam.lamresearch.com Strip & Clean Products - Lam Research
CORONUS系列產品. Plasma Bevel Clean. 這些晶邊清洗系列產品可去除晶圓邊緣上的不必要材料，保護 ... https://www.lamresearch.com Strip & Clean Products | Photoresist Strip. Wet Clean. Plasma ...
Wet processing technologies can be used for wafer cleaning as well as strip and etch applications. Plasma bevel cleaning is used to enhance die yield by ... https://mylam.lamresearch.com US8137501B2 - Bevel clean device - Google Patents
An apparatus for removing material on a bevel of a wafer is provided. A wafer support with a diameter that is less than the diameter of the wafer, wherein the ... https://patents.google.com WO2008097996A1 - Bevel clean device - Google Patents
US8137501B2 * 2007-02-08 2012-03-20 Lam Research Corporation Bevel clean device. US7981307B2 * 2007-10-02 2011-07-19 Lam Research Corporation ... https://patents.google.com |